AMORPHOUS HYDROGENATED SILICON INHOMOGENEITIES AS REVEALED BY SCANNING WITH MERCURY AND LASER PROBES

被引：2

作者：

ANDRIANOVA, E

GERDITSKAYA, J

ROIZIN, Y

SVIRIDOV, V

机构：

[1] Odessa State University, 270100 Odessa

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1991年 / 137卷

关键词：

D O I：

10.1016/S0022-3093(05)80061-4

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Inhomogeneities of amorphous hydrogenated silicon films on glass and crystalline silicon substrates were investigated by scanning with small-size mercury and laser probes. Transverse and planar conductivities of amorphous silicon films and the photoresponse were registered The obtained line scans were compared with the topograms of optical parameters deduced from ellipsometric measurements. The peculiarities of conductivity and optical absorption are attributed to fluctuations of hydrogen content in the volume of the investigated films.

引用

页码：79 / 82

页数：4