INP PN JUNCTION WAVE-GUIDE MADE BY MG-ION IMPLANTATION

被引：4

作者：

OIGAWA, K ^{[1
]}

UEKUSA, S ^{[1
]}

SUGIYAMA, Y ^{[1
]}

TACANO, M ^{[1
]}

机构：

[1] ELECTROTECH LAB, SAKURA, IBARAKI 305, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1986年 / 25卷 / 12期

关键词：

D O I：

10.1143/JJAP.25.1902

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1902 / 1904

页数：3

共 9 条

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