AN ALGORITHM FOR CALCULATING DOSE PROFILES IN MULTILAYERED DEVICES USING A PERSONAL-COMPUTER

被引:11
作者
GARTH, JC
机构
关键词
D O I
10.1109/TNS.1986.4334590
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1266 / 1270
页数:5
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