PHOTOVOLTAIC INFRARED-SENSOR ARRAYS IN MONOLITHIC LEAD CHALCOGENIDES ON SILICON

被引:76
作者
ZOGG, H
MAISSEN, C
MASEK, J
HOSHINO, T
BLUNIER, S
TIWARI, AN
机构
[1] Swiss Federal Inst. of Technol., ETH Honggerberg, Zurich
关键词
D O I
10.1088/0268-1242/6/12C/008
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
MBE growth of epitaxial IV-VI lead salt layers on Si (111) substrates and fabrication of photovoltaic infrared devices in the layers is reviewed. IV-VI on Si IR sensors have potential as a low-cost technique of fabrication of large IR focal plane arrays for both the 3-5-mu-m and 8-12-mu-m ranges because of the easy fabrication procedure and because uniformity problems are much less severe in IV-VIs due to the weaker composition dependence of the bandgap compared with Cd(1-x)Hg(x)Te. Sensor arrays are fabricated i n 2-4-mu-m thick PbTe, PbS(1-x)Se(x) and Pb(1-x)Eu(x)Se for 3-5-mu-m and in Pb(1-x)Sn(x)Se for 8-12-mu-m cut-off. An intermediate epitaxial stacked 0.2-mu-m thick CaF2-BaF2 bilayer serves for compatibility and helps to overcome the large lattice and thermal expansion mismatch between the Si substrate and the IV-VI layer. Perfectly smooth surfaces with surface defect concentrations down to 103 cm-2, and x-ray rocking-curve linewidth of almost-equal-to 150 arcsec are obtained. Sensor arrays with 66 and 256 elements are described, the latter having been grown on standard Si chips with Al metallization.
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页码:C36 / C41
页数:6
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