LASER GENERATION AND DETECTION OF SURFACE ACOUSTIC-WAVES - ELASTIC PROPERTIES OF SURFACE-LAYERS

A noncontact all-optical method for surface photoacoustics is described. The surface acoustic waves (SAWs) were excited employing a KrF laser and detected with a Michelson interferometer using a 633-nm HeNe laser. Due to an active stabilization scheme developed for the interferometer a surface displacement of 0.2 angstrom could be detected. The materials investigated included pure materials such as polycrystalline aluminum, and crystalline silicon; films of gold, silver, aluminum, iron, and nickel on fused silica; and a-Si:H on Si(100). In the case of pure materials the shape of the acoustic pulse and the phase velocity were determined. The dispersion of the SAW phase velocity observed for the film systems was used to extract information on the film thickness, density, and transverse and longitudinal sound velocity. Models for the theoretical treatment of film systems and the calculation of dispersion curves are presented.