HETEROEPITAXY OF TIO2, VO2 FILMS AND TIO2/VO2 MULTILAYERS GROWN ON SAPPHIRE (11(2)BAR-0) BY METALLOORGANIC CHEMICAL VAPOR-DEPOSITION

被引：10

作者：

CHANG, HLM

GAO, Y

ZHANG, TJ

LAM, DJ

机构：

[1] Materials Science Division, Argonne National Laboratory, Argonne

来源：

THIN SOLID FILMS | 1992年 / 216卷 / 01期

关键词：

D O I：

10.1016/0040-6090(92)90859-A

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Single-crystal TiO2 and VO2 films in single-layer and multilayer configurations have been successfully grown on sapphire (1120BAR) by the metallo-organic chemical vapor deposition technique. The epitaxial orientation relationships were determined by the X-ray diffraction and transmission electron microscopy techniques. High resolution electron microscopy studies were performed to examine the microstructures of the films at atomic level.

引用

页码：4 / 7

页数：4

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