IMPROVEMENT OF DIELECTRIC-PROPERTIES OF PLASMA POLYMERIZED STYRENE WITH HYDROGEN PLASMA TREATMENT

被引：8

作者：

SAWA, G ^{[1
]}

YAMANAKA, S ^{[1
]}

NAKAMURA, S ^{[1
]}

YAMAGUCHI, S ^{[1
]}

机构：

[1] SUZUKA TECH COLL,DEPT ELECTR ENGN,SUZUKA 51002,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 03期

关键词：

D O I：

10.1143/JJAP.20.L201

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L201 / L204

页数：4

共 11 条

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[10]

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