MULTIPLE SUBMICRON-SIZED SCHOTTKY POINT CONTACTS INTERCONNECTED BY A SUBMICRON-SIZED AIRBRIDGE

被引:6
作者
SCHMIDT, PE
KOSEMURA, K
OKADA, M
YOKOYAMA, N
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.585429
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1598 / 1600
页数:3
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