SYNTHESIS AND RADIATION DEGRADATION OF VINYL-POLYMERS WITH FLUORINE - SEARCH FOR IMPROVED LITHOGRAPHIC RESISTS

被引：35

作者：

PITTMAN, CU ^{[1
]}

CHEN, CY ^{[1
]}

UEDA, M ^{[1
]}

HELBERT, JN ^{[1
]}

KWIATKOWSKI, JH ^{[1
]}

机构：

[1] USA,ELECTR TECHNOL & DEVICES LAB,FT MONMOUTH,NJ 07703

来源：

关键词：

D O I：

10.1002/pol.1980.170181208

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：3413 / 3425

页数：13

共 27 条

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