EFFECTS OF TEMPERATURE ON ACCURACY OF CRYSTAL OSCILLATOR THICKNESS MONITORS

被引：5

作者：

PORTER, WA

ANDERSON, SW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 06期

关键词：

D O I：

10.1116/1.1317062

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Communication to the Editor gives analytical predictions of the effect of temperature on the accuracy of film thickness measurement obtained with a crystal oscillator thickness monitor. A method of temperature compensation is proposed.

引用

页码：1472 / &

共 10 条

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[2] BEHRNDT KH, 1966, PHYSICS THIN FILMS, V3
[3] ESCHBACH HL, 1966, VACUUM MICROBALANCE, V5, P207
[4] GOSS L, PRIVATE COMMUNICATIO
[5] A VERSATILE THIN FILM THICKNESS MONITOR OF HIGH ACCURACY
LAWSON, WH
[J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1967, 44 (11): : 917 - &
[6] Lostis P., 1959, REV OPT, V38, P1
[7] Maissel L.I., 1970, HDB THIN FILM TECHNO
[8] NIEDERMAYER R, 1966, VACUUM MICROBALANCE, V5, P217
[9] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG
SAUERBREY, G
[J]. ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02): : 206 - 222
[10] WARNER AW, 1962, VACUUM MICROBALANCE, V2, P71

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