NEW PRINCIPLE OF FEEDING FOR FLASH EVAPORATION MOCVD DEVICES

被引：45

作者：

KAUL, AR

SELEZNEV, BV

机构：

[1] Moscow State Univ., Moscow

来源：

JOURNAL DE PHYSIQUE IV | 1993年 / 3卷 / C3期

关键词：

D O I：

10.1051/jp4:1993351

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A novel scheme of flash evaporation feeding for MOCVD processes of multicomponent oxide films deposition is proposed. The scheme comprises 1) microdozage of organic solution of solid volatile precursors on the glass fiber belt, 2) evaporation of the solvent and 3) flash evaporation of MOC microdoses from the belt. The functioning of the designed feeder is described and the features of proposed scheme in comparison to existing feeding principles are discussed.

引用

页码：375 / 378

页数：4