NON EQUILIBRIUM CHARACTERIZATION AND SPECTROSCOPIC ANALYSIS OF AN INDUCTIVELY COUPLED ARGON PLASMA

被引:35
作者
VANDERMULLEN, JAM
NOWAK, S
VANLAMMEREN, ACAP
SCHRAM, DC
VANDERSIJDE, B
机构
关键词
D O I
10.1016/0584-8547(88)80061-2
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
引用
收藏
页码:317 / 324
页数:8
相关论文
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