Thermal and structural analyses of a water- or liquid-gallium-cooled silicon crystal X-ray monochromator subjected to high heat loads have been carried out using a finite-element method. Rocking curves were produced from the computed strain distributions in the crystal and compared with experimentally measured rocking curves. Good agreement between the general width and shape of the calculated and measured rocking curve profiles was obtained. This agreement provides a foundation for extending our modeling to the prediction of X-ray optical component performance with more-complex cooling schemes. Such elaborate cooling techniques may be required for the increased power load that will be produced by insertion devices in the next generation of low-emittance storage ring sources, such as the Advanced Photon Source (APS) to be constructed at Argonne National Laboratory. © 1990.