PREPARATION OF C-AXIS-ORIENTED PLT THIN-FILMS BY THE METALORGANIC CHEMICAL VAPOR-DEPOSITION METHOD

被引：23

作者：

TOMINAGA, K ^{[1
]}

MIYAJIMA, M ^{[1
]}

SAKASHITA, Y ^{[1
]}

SEGAWA, H ^{[1
]}

OKADA, M ^{[1
]}

机构：

[1] NIPPON MIN CO LTD, TODA, SAITAMA 335, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 10期

关键词：

C-axis orientation; Ferroelectric; MOCVD; Perovskite; PLT thin film;

D O I：

10.1143/JJAP.29.L1874

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

La-modified lead titanate (PLT) thin films are prepared by the metalorganic chemical vapor deposition method. Tetraethyl lead, titanium tetraisopropoxide and trisdipivaloylmethanato lanthanum are used as source materials. The films obtained at 600°C under reduced pressure of 6 Torr constitute PLT of the single perovskite phase, and highly c-axis-oriented films are grown on MgO(100). The crystal structures are transferred from the tetragonal to the cubic structure with increasing molar fraction of La2O3. The dielectric constant and tan δ are around 800 to 2700 and 0.04 to 0.1. © 1990 IOP Publishing Ltd.

引用

页码：L1874 / L1876

页数：3

共 6 条

[1] ELECTROOPTIC EFFECTS OF (PB, LA)(ZR, TI)O3 THIN-FILMS PREPARED BY RF PLANAR MAGNETRON SPUTTERING
ADACHI, H
KAWAGUCHI, T
SETSUNE, K
OHJI, K
WASA, K
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (10) : 867 - 868
[2] SPECTROSCOPIC STUDY ON SPUTTERING OF PLZT THIN-FILM
IBUKI, S
NAKAGAWA, T
OKUYAMA, M
HAMAKAWA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (03): : 532 - 535
[3] EPITAXIAL-GROWTH AND THE CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES OF LANTHANUM-MODIFIED LEAD TITANATE THIN-FILMS
IIJIMA, K
TAKAYAMA, R
TOMITA, Y
UEDA, I
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (08) : 2914 - 2919
[4] PREPARATION OF C-AXIS-ORIENTED PBTIO3 THIN-FILMS BY MOCVD UNDER REDUCED PRESSURE
OKADA, M
TAKAI, S
AMEMIYA, M
TOMINAGA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (06): : 1030 - 1034
[5] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF C-AXIS ORIENTED PZT THIN-FILMS
OKADA, M
TOMINAGA, K
ARAKI, T
KATAYAMA, S
SAKASHITA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (04): : 718 - 722
[6] OKADA M, 1988, NIPPON SERAM KYO GAK, V96, P1024

← 1 →