EFFECTS OF DOSAGE AND ANNEALING ON THE MAGNETIC-BEHAVIOR OF ION-IMPLANTED GARNET-FILMS

被引：12

作者：

MAARTENSE, I ^{[1
]}

SEARLE, CW ^{[1
]}

WASHBURN, HA ^{[1
]}

机构：

[1] INTEL MAGNET INC,SANTA CLARA,CA

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 03期

关键词：

D O I：

10.1063/1.328932

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2361 / 2363

页数：3

相关论文

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[2] JOSEPHS RM, 1973, AIP C P, V10, P286
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[4] KOMENOU K, 1978, J APPL PHYS, V49, P5816, DOI 10.1063/1.324597
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[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (11) : 5919 - 5923
[6] TEMPERATURE-DEPENDENCE OF ANISOTROPY FIELD AND COERCIVITY IN EPITAXIAL FILMS OF MIXED RARE-EARTH IRON GARNETS
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[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) : 449 - 454
[7] SUPPRESSION OF HARD BUBBLES IN MAGNETIC GARNET FILMS BY ION-IMPLANTATION - DEPENDENCE ON ION SPECIES, DOSE, ENERGY, AND ANNEALING
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[J]. APPLIED PHYSICS LETTERS, 1973, 22 (12) : 683 - 685