REDUCED METAL-INSULATOR SEMICONDUCTOR TUNNELING IN METALORGANIC CHEMICAL VAPOR-DEPOSITION HGCDTE(111)TE FILMS

被引:4
作者
KOESTNER, R
LOPES, V
KORENSTEIN, R
OGUZ, S
KREISMANIS, V
EHSANI, H
BHAT, I
机构
[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265
[2] RAYTHEON CO,LEXINGTON,MA 02173
[3] RENSSELAER POLYTECH INST,TROY,NY 12181
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.586262
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Metal-insulator semiconductor tunnel currents in metalorganic chemical vapor deposition (MOCVD) HgCdTe(111)Te layers are measured to be comparable to those found in high quality liquid phase epitaxy HgCdTe(111)Te. These tunnel currents are found to increase if CdTe rather than lattice-matched CdZnTe substrates are chosen or if the (001) growth orientation is selected. The rotational twins that generally form with (111) oriented HgCdTe growth by MOCVD are not detectable in more than 60% of the films characterized in this work. These results mark an important step towards the use of MOCVD HgCdTe heterostructure or heterojunction films for high performance infrared focal plane arrays.
引用
收藏
页码:1643 / 1650
页数:8
相关论文
共 9 条