TRIBOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS IN RELATION TO FILM MORPHOLOGY

被引:61
作者
SPALVINS, T
机构
关键词
D O I
10.1016/0040-6090(80)90492-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:291 / 297
页数:7
相关论文
共 8 条
  • [1] RF SPUTTERED MOS2 PARAMETER EFFECTS ON WEAR LIFE
    CHRISTY, RI
    LUDWIG, HR
    [J]. THIN SOLID FILMS, 1979, 64 (02) : 223 - 229
  • [2] GARDOS MN, 1976, LUBR ENG, V32, P463
  • [3] LAVIK MT, 1972, ASLE TRANS, V15, P233
  • [4] NISHIMURA M, 1978, 2ND P ASLE INT C SOL, V6, P128
  • [5] SPALVINS T, 1971, ASLE TRANS, V14, P267
  • [6] SPALVINS T, 1978, 2ND INT C SOL LUBR, V6, P109
  • [7] SPALVINS T, 1973, TND7169 NASA TECH NO
  • [8] SPALVINS T, 1974, ASLE T, V17, P17