EFFECTS OF SURFACE PRETREATMENTS ON NUCLEATION AND GROWTH OF DIAMOND FILMS ON A VARIETY OF SUBSTRATES

被引:86
作者
MORRISH, AA [1 ]
PEHRSSON, PE [1 ]
机构
[1] USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
关键词
D O I
10.1063/1.105448
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effects of surface pretreatments on nucleation and growth of chemical vapor deposited diamond films were studied. The pretreatments included scratching with diamond grit, coating with a low vapor pressure, high thermal stability hydrocarbon oil, and coating with a 100-200-angstrom-thick layer of evaporated carbon. The effects of the treatments on carbide and noncarbide forming materials are described.
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页码:417 / 419
页数:3
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