PHYSICAL AND ELECTRICAL PROPERTIES OF THIN-FILM BARIUM-TITANATE PREPARED BY RF SPUTTERING ON SILICON SUBSTRATES

被引：6

作者：

MAHER, GH

DIEFENDORF, RJ

机构：

来源：

IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING | 1972年 / PHP8卷 / 03期

关键词：

D O I：

10.1109/TPHP.1972.1136575

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：11 / +

页数：1

共 14 条

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[3] PREPARATION AND PROPERTIES OF THIN BARIUM TITANATE FILMS [J].

FEUERSANGER, AE ;

HAGENLOCHER, AK ;

SOLOMON, AL .

[4]

KALISZ L, 1968, ACTA PHYS POL, V23, P381

[5]

MAHER GH, 1971, THESIS RENSSELAER PO

[6]

MOSSON S, 1970, J PHYS SOC JAP S, V28, P421

[7]

MULLER EM, 1963, ELECTROCHEM TECHNOL, V1, P158

[8]

PRATT JH, 1971, J VAC SCI TECHNOL, V8, P256

[9]

REIBER LM, 1969, 1 EUR SPUT S TOUL

[10]

SEKINE E, 1962, REV ELEC COMMUN LAB, V10, P457