SURFACE-ACOUSTIC-WAVE (SAW) FLOW SENSOR

被引：18

作者：

JOSHI, SG

机构：

[1] Department of Electrical and Computer Engineering, Marquette University, Milwaukee

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1991年 / 38卷 / 02期

关键词：

D O I：

10.1109/58.68472

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The use of a surface acoustic wave (SAW) device to measure rate of gas flow is described. A SAW oscillator heated to a suitable temperature above ambient is placed in the path of the flowing gas. Convective cooling caused by gas flow results in a change in the oscillator frequency. A 73-MHz oscillator fabricated on 128-degrees rotated Y-cut lithium niobate substrate and heated to 55-degrees-C above ambient shows a frequency variation greater than 142 kHz for flow rate variation from 0 to 1000 cm3/min. Theoretical expressions for sensitivity and response time of the sensor are derived. It is shown that by using ultrasonic Lamb waves propagating in thin membranes, a flow sensor with faster response than a SAW sensor can be realized.

引用

页码：148 / 158

页数：11

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IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1987, 34 (02) :253-258

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