PRECISE MEASUREMENT OF FLOW-RATES OF VAPORIZED TETRAETHYLGERMANIUM CARRIED BY AN INERT-GAS

被引：10

作者：

GAZICKI, M ^{[1
]}

SCHALKO, H ^{[1
]}

SVASEK, P ^{[1
]}

OLCAYTUG, F ^{[1
]}

KOHL, F ^{[1
]}

机构：

[1] VIENNA TECH UNIV,LUDWIG BOLTZMANN INST BIOMED MIKROTECH,A-1040 VIENNA,AUSTRIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.578149

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The "rate-of-rise" technique has been applied for the measurement of the flow rate of tetraethylgermanium carried in a stream of argon. A very precise time counter designed and constructed for this purpose is described. A simple model is presented where the flow rate of the vapor is proportional to its partial pressure and to the flow rate of the carrier gas and inversely proportional to the partial pressure of the carrier gas. The assumed applicability of the equation of state of the ideal gas to the discussed system is successfully tested by means of the flow rate dependence on temperature in the range from - 19 to 20-degrees-C and its comparison with data computed from the Clausius-Clapeyron equation. Finally thermodynamic properties of tetraethylgermanium namely vaporization enthalpy and saturated vapour pressure at standard temperature are calculated from the results of flow rate measurements.

引用

页码：51 / 58

页数：8

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