LENGTH MEASUREMENT USING INFRARED 2-WAVELENGTH HE-XE LASER INTERFEROMETER

被引：6

作者：

MATSUMOTO, H

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1982年 / 53卷 / 05期

关键词：

D O I：

10.1063/1.1137034

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：641 / 643

页数：3

共 14 条

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[9] ALIGNMENT OF LENGTH-MEASURING IR LASER INTERFEROMETER USING LASER FEEDBACK [J].

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[10] LENGTH MEASUREMENT OF GAUGE BLOCKS USING A 3.39 MU-M HE-NE-LASER INTERFEROMETER [J].

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JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (04) :713-718

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