LASER DIRECT WRITING OF ALUMINUM CONDUCTORS

被引：54

作者：

CACOURIS, T ^{[1
]}

SCELSI, G ^{[1
]}

SHAW, P ^{[1
]}

SCARMOZZINO, R ^{[1
]}

OSGOOD, RM ^{[1
]}

KRCHNAVEK, RR ^{[1
]}

机构：

[1] BELL COMMUN RES,MORRISTOWN,NJ 07960

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 22期

关键词：

D O I：

10.1063/1.99609

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1865 / 1867

页数：3

共 12 条

[1]

BAUERLE D, 1986, CHEM PROCESSING LASE

[2] SUPPLEMENTAL MULTILEVEL INTERCONNECTS BY LASER DIRECT WRITING - APPLICATION TO GAAS DIGITAL INTEGRATED-CIRCUITS [J].

BLACK, JG ;

DORAN, SP ;

ROTHSCHILD, M ;

EHRLICH, DJ .

APPLIED PHYSICS LETTERS, 1987, 50 (15) :1016-1018

[3]

BLACK JG, 1986, C LASERS ELECTROOPTI

[4] LASER PROJECTION PATTERNED ALUMINUM METALLIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS [J].

BLONDER, GE ;

HIGASHI, GS ;

FLEMING, CG .

APPLIED PHYSICS LETTERS, 1987, 50 (12) :766-768

[5]

CACOURIS T, 1987, APR C LAS EL BALT, P289

[6] DIRECT WRITING OF METAL CONDUCTORS WITH NEAR-UV LIGHT [J].

GILGEN, HH ;

CACOURIS, T ;

SHAW, PS ;

KRCHNAVEK, RR ;

OSGOOD, RM .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (02) :55-66

[7]

GILGEN HH, 1985, BEAM INDUCED CHEM PR, P117

[8]

HIGASHI GS, 1987, MATER RES SOC S P, V75, P117

[9]

KISHIDA S, 1987, APR TECHN DIG C LAS, P282

[10]

KRCHNAVEK RR, 1985, BEAM INDUCED CHEM PR, P140

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