CORRELATION BETWEEN THE MODIFICATION OF THE CHEMICAL-STRUCTURE AND THE ELECTRICAL-PROPERTIES OF AR-ION BOMBARDED POLYIMIDE

被引：43

作者：

MARLETTA, G ^{[1
]}

PIGNATARO, S ^{[1
]}

OLIVERI, C ^{[1
]}

机构：

[1] SGS THOMSON MICROELECTR, I-95100 CATANIA, ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90898-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：792 / 795

页数：4

共 11 条

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