DEPOSITION OF MULTICOMPONENT PHASES BY ION PLATING

被引:10
作者
HARKER, HR
HILL, RJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 06期
关键词
D O I
10.1116/1.1317047
中图分类号
O59 [应用物理学];
学科分类号
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页码:1395 / &
相关论文
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