SYNTHESIS AND MEASUREMENT OF NORMAL INCIDENCE X-RAY MULTILAYER MIRRORS OPTIMIZED FOR A PHOTON ENERGY OF 390 EV

被引：25

作者：

KOZHEVNIKOV, IV

FEDORENKO, AI

KONDRATENKO, VV

PERSHIN, YP

YULIN, SA

ZUBAREV, EN

PADMORE, HA

CHEUNG, KC

VANDORSSEN, GE

ROPER, M

BALAKIREVA, LL

SEROV, RV

VINOGRADOV, AV

机构：

[1] KHARKOV POLYTECH INST,KHARKOV,UKRAINE

[2] LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

[3] SERC,DARESBURY LAB,WARRINGTON WA4 4AD,CHESHIRE,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1994年 / 345卷 / 03期

关键词：

D O I：

10.1016/0168-9002(94)90520-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The problems inherent in the fabrication of short period multilayer mirrors are discussed and results of the synthesis of multilayer structures with nanometer period are presented. The shortest period observed is 13 angstrom for W-Si and W-B4C sputtered multilayers. Measurements of near normal incidence reflectivity at lambda = 31-32 angstrom are presented for W-Sc multilayers with a period approximately 16 angstrom. The measured reflectivity reaches a maximum of 3.3% and is in good agreement with theoretical modeling after the inclusion of interfacial roughness.

引用

页码：594 / 603

页数：10

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