THEORY OF LINEAR FACET GROWTH DURING THERMAL ETCHING

被引：142

作者：

MULLINS, WW

机构：

来源：

PHILOSOPHICAL MAGAZINE | 1961年 / 6卷 / 71期

关键词：

D O I：

10.1080/14786436108241227

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1313 / 1341

页数：29

共 21 条

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