CHARACTERISTICS OF A HYDROGEN GAS-FIELD ION-SOURCE FOR MICROPROBE APPLICATION

被引：17

作者：

ALLAN, GL ^{[1
]}

LEGGE, GJF ^{[1
]}

ZHU, J ^{[1
]}

机构：

[1] SHANGHAI INST NUCL RES,SHANGHAI,PEOPLES R CHINA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 34卷 / 01期

关键词：

IONIZATION - PARTICLE BEAMS;

D O I：

10.1016/0168-583X(88)90374-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A hydrogen gas field ion source has been built specifically for use with a scanning proton microprobe. Source parameters have been measured on a testbench and show that a current of 20 nA within an angular spread of plus or minus 550 mrad can be achieved from an Ir emitter, with an estimated virtual source size of 0. 001 mu m. This is 10**5 times brighter than the beam available to the microprobe from standard accelerator sources.

引用

页码：122 / 126

页数：5

共 16 条

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