NEW RESULTS IN DC REACTIVE MAGNETRON DEPOSITION OF TINX FILMS

被引：70

作者：

MUSIL, J ^{[1
]}

KADLEC, S ^{[1
]}

VYSKOCIL, J ^{[1
]}

VALVODA, V ^{[1
]}

机构：

[1] CHARLES UNIV, FAC MATH & PHYS, DEPT SEMICOND PHYS, CS-12116 PRAGUE, CZECHOSLOVAKIA

来源：

THIN SOLID FILMS | 1988年 / 167卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90487-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 119

页数：13

共 22 条

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[6] INFLUENCE OF THE PUMPING SPEED ON THE HYSTERESIS EFFECT IN THE REACTIVE SPUTTERING OF THIN-FILMS [J].

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[7]

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[9]

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[10]

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