ACHIEVING A GIVEN REFLECTANCE FOR UNPOLARIZED LIGHT BY CONTROLLING THE INCIDENCE ANGLE AND THE THICKNESS OF A TRANSPARENT THIN-FILM ON AN ABSORBING SUBSTRATE - APPLICATION TO ENERGY EQUIPARTITION IN THE 4-DETECTOR PHOTOPOLARIMETER

被引:3
作者
AZZAM, RMA
GIARDINA, KA
机构
[1] Department of Electrical Engineering, University of New Orleans, Lakefront, New Orleans, LA
来源
APPLIED OPTICS | 1992年 / 31卷 / 07期
关键词
D O I
10.1364/AO.31.000935
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
At a given wavelength-lambda we determine all possible solution pairs (phi, zeta) of the incidence angle-phi and the thickness-zeta of a transparent thin film on an absorbing substrate that achieve a given unpolarized light reflectance R(u). The trajectory of the point that represents a solution pair in the zeta, phi-plane depends on the optical properties of the film and substrate and on whether R(u) is greater than or less than the normal-incidence reflectance RBAR0 of the bare substrate. When R(u) > RBAR0, the specified reflectance is achieved over a limited range of phi. At the least possible incidence angle, the film thickness is almost-equal-to 1/8th wave. As an application we consider SiO2 films on Si detectors that produce R(u) = 0.75, 0.6667, and 0.50 at lambda = 337 and 633 nm. If the first three detectors of the four-detector photopolarimeter (FDP) are coated to have these reflectance levels, with the reflectance diminishing in the direction of propagation of the light beam, and the last detector is antireflection coated (e.g., with a quarter-wave Si3N4 layer), equipartition of energy among the four detectors is accomplished for incident unpolarized light. Such a condition is desirable in the operation of the FDP. The ellipsometric parameters of the coated surfaces and the FDP instrument matrix are also calculated.
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页码:935 / 942
页数:8
相关论文
共 6 条
[1]   DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].
ASPNES, DE ;
STUDNA, AA .
PHYSICAL REVIEW B, 1983, 27 (02) :985-1009
[2]   INSTRUMENT MATRIX OF THE 4-DETECTOR PHOTOPOLARIMETER - PHYSICAL MEANING OF ITS ROWS AND COLUMNS AND CONSTRAINTS ON ITS ELEMENTS [J].
AZZAM, RMA .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1990, 7 (01) :87-91
[3]   GENERAL-ANALYSIS AND OPTIMIZATION OF THE 4-DETECTOR PHOTOPOLARIMETER [J].
AZZAM, RMA ;
ELMINYAWI, IM ;
ELSABA, AM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (05) :681-689
[4]  
Azzam RMA., 1999, ELLIPSOMETRY POLARIZ
[6]   REFRACTIVE-INDEX DISPERSION IN SEMICONDUCTOR-RELATED THIN-FILMS [J].
WARNECKE, AJ ;
LOPRESTI, PJ .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1973, 17 (03) :256-262