ELECTRON BACKSTREAM TO THE SOURCE PLASMA REGION IN AN ION-SOURCE

被引：26

作者：

OHARA, Y

AKIBA, M

ARAKAWA, Y

OKUMURA, Y

SAKURABA, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 07期

关键词：

D O I：

10.1063/1.328141

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3614 / 3621

页数：8

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