THE STRUCTURE AND MAGNETIC-PROPERTIES OF SPUTTERED, AMORPHOUS COFESIB THIN-FILMS

被引：14

作者：

BANERJEE, R ^{[1
]}

CHOE, G ^{[1
]}

CHO, BI ^{[1
]}

WALSER, RM ^{[1
]}

机构：

[1] UNIV TEXAS,I UCR CTR MAGNET,AUSTIN,TX 78712

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1995年 / 31卷 / 06期

关键词：

D O I：

10.1109/20.489795

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Amorphous wires and ribbons of composition Co70.5Fe4.5Si15B10 have a very small magnetostriction and very low coercivities for wall motion. Their high permeabilities are of considerable technological interest [1]. Thin films of these alloys might be useful for applications, but had not been previously studied. This work studied the structural and magnetic properties amorphous thin films sputtered from an alloy target with the composition Co70.5Fe4.5Si15B10. The results obtained show, that the coercivity and in-plane anisotropy of the sputtered films are much larger than those of ribbons and wires. Attempts to reduce these parameters by varying the processing and annealing parameters, substrate material, composition, and film thickness were largely unsuccessful. While these results are not understood, the composite data suggests that the higher values may be due to micro-compositional inhomogeneities quench rates of sputtering.

引用

页码：3856 / 3858

页数：3

共 10 条

[1]

ARAI KI, 1975, 2ND INT C RAP QUENCH, P489

[2] OBSERVATION OF MAGNETIC HYSTERESIS LOOP OF THE PERMINVAR TYPE IN WORKED CO-BASED AMORPHOUS-ALLOYS [J].