HIGH-YIELD SPUTTERING EVENTS FOR AR+-ION BOMBARDMENT OF CU IN THE ENERGY-RANGE 1-20 KEV

被引:15
作者
SMITH, R
HARRISON, DE
机构
来源
PHYSICAL REVIEW B | 1989年 / 40卷 / 04期
关键词
D O I
10.1103/PhysRevB.40.2090
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:2090 / 2096
页数:7
相关论文
共 10 条
[1]   SPUTTERING MODELS - A SYNOPTIC VIEW [J].
HARRISON, DE .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :1-64
[2]  
HARRISON DE, 1988, CRIT REV SOLID STATE, V14, P1
[3]   THEORETICAL-STUDIES OF ION-BOMBARDMENT - MANY-BODY INTERACTIONS [J].
LO, DY ;
TOMBRELLO, TA ;
SHAPIRO, MH ;
GARRISON, BJ ;
WINOGRAD, N ;
HARRISON, DE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :708-711
[4]   THE THEORY OF SURFACE EROSION BY ION-BOMBARDMENT [J].
SMITH, R ;
CARTER, G ;
NOBES, MJ .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1986, 407 (1833) :405-+
[5]  
SMITH R, IN PRESS COMPUT PHYS
[6]  
SMITH R, 1980, PHILOS MAG, V42, P35
[7]  
TSONG IST, 1988, APPL PHYS LETT, V53, P2039
[8]  
TSONG IST, 1988, PHYS REV B, V38, P8444
[9]   COMPUTER-SIMULATION OF PIT FORMATION IN METALS BY ION-BOMBARDMENT [J].
WEBB, RP ;
HARRISON, DE .
PHYSICAL REVIEW LETTERS, 1983, 50 (19) :1478-1481
[10]  
WHITTON JL, 1986, NATO ASI SER E30, V112, P151