FRAGMENTATION SPECTRA AND APPEARANCE POTENTIALS OF VACUUM PUMP FLUIDS DETERMINED BY ELECTRON-IMPACT MASS-SPECTROMETRY

被引:14
作者
DANNA, E
LEGGIERI, G
LUCHES, A
PERRONE, A
机构
[1] University of Lecce, Department of Physics, Lecce, Italy
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 06期
关键词
D O I
10.1116/1.574209
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:3436 / 3441
页数:6
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