FREQUENCY ANALYSIS OF PROBE CURRENT IN AN RF DISCHARGE

被引：3

作者：

SAGER, O

机构：

[1] Inst. for High Frequency Electronics, Swiss Federal Inst. Tech., Zurich

来源：

PROCEEDINGS OF THE IEEE | 1969年 / 57卷 / 02期

关键词：

D O I：

10.1109/PROC.1969.6931

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The The harmonics of the probe current under the influence of a capacitively coupled disturbing voltage are discussed. From the ratio of two amplitudes the unknown RF voltage and the necessary correction of the direct current can be determined. © 1969 IEEE. All rights reserved.

引用

页码：227 / &