SELF-CONSISTENT STOCHASTIC ELECTRON HEATING IN RADIO-FREQUENCY DISCHARGES

被引：74

作者：

GOEDDE, CG

LICHTENBERG, AJ

LIEBERMAN, MA

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

关键词：

D O I：

10.1063/1.341286

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4375 / 4383

页数：9

共 16 条

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[3] [Anonymous], [No title captured]
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[5] Fermi E., 1949, PHYS REV, V75, P1169, DOI [DOI 10.1103/PHYSREV.75.1169, 10.1103/PhysRev.75.1169]
[6] Godyak V. A., 1979, Soviet Physics - Technical Physics, V24, P1255
[7] Godyak V.A., 1980, SOV J PLASMA PHYS, V6, P372
[8] Godyak V A, 1976, SOV J PLASMA PHYS, V2, P78
[9] GODYAK VA, 1972, SOV PHYS TECH PHYS-U, V16, P1073
[10] GODYAK VA, 1979, SOV J PLASMA PHYS, V5, P376