APPLICATION OF STEREOGRAPHIC TECHNIQUES TO SCANNING ELECTRON MICROSCOPE

被引：42

作者：

LANE, GS

机构：

[1] British Railways Research Department, Engineering Research Division, Derby

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1969年 / 2卷 / 07期

关键词：

D O I：

10.1088/0022-3735/2/7/303

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A stereographic technique has been developed for the accurate determination of the dimensions of features on scanning electron micrographs. More general methods than those used previously are shown to be necessary largely because of the wide range of operating angles available in the scanning electron microscope. An experimental verification of the method is described which shows that results accurate to ±5% can be obtained, without precision measuring equipment.

引用

页码：565 / &