IMPROVEMENT OF WEAR PROPERTIES OF GLASSY-CARBON SURFACE-LAYER MODIFIED BY ION IMPLANTATIONS

被引：26

作者：

IWAKI, M

TAKAHASHI, K

YOSHIDA, K

OKABE, Y

机构：

[1] TORAY RES CTR INC,OTSU,SHIGA 520,JAPAN

[2] SAITAMA INST TECHNOL,OKABEMACHI,SAITAMA 36902,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90878-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：700 / 703

页数：4

共 10 条

[1]

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[6] ELECTRICAL-PROPERTIES OF TI AND CR ION-IMPLANTED DIAMONDS DEPENDENT ON TARGET TEMPERATURE [J].

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :822-825

[7] EFFECT OF ION-IMPLANTATION ON ELECTROCHEMICAL AND SURFACE-PROPERTIES OF GLASSY-CARBON [J].

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IWAKI, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :526-529

[8]

Wielunski L. S., 1988, Fundamentals of Beam-Solid Interactions and Transient Thermal Processing. Symposium, P213

[9]

Yoshida K., 1988, Fundamentals of Beam-Solid Interactions and Transient Thermal Processing. Symposium, P207

[10] WEAR REDUCTION OF GLASSY-CARBON BY LI IMPLANTATION [J].

YOSHIDA, K ;

TAKAHASHI, K ;

OKUNO, K ;

KATAGIRI, G ;

IWAKI, M ;

ISHITANI, A .

APPLIED PHYSICS LETTERS, 1988, 52 (13) :1046-1048

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