SURFACE-MORPHOLOGY DURING MULTILAYER EPITAXIAL-GROWTH OF GE(001)

被引:170
作者
VANNOSTRAND, JE
CHEY, SJ
HASAN, MA
CAHILL, DG
GREENE, JE
机构
[1] Department of Materials Science, Materials Research Laboratory, University of Illinois, Urbana
关键词
D O I
10.1103/PhysRevLett.74.1127
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The surface morphology of Ge(001) films grown by molecular beam epitaxy on a Ge(001) substrate is measured using scanning tunneling microscopy. Growth mounds are observed for single crystal films deposited at temperatures of 60-230°C and film thicknesses of 5 nm to 1 μm. With increasing growth temperature, the average separation between mounds becomes increasingly well defined, increasing from less than 10 nm at 60°C to nearly 200 nm at 230°C. This regular arrangement of growth mounds is inconsistent with the self-affine growth morphology predicted by most kinetic roughening models. © 1995 The American Physical Society.
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页码:1127 / 1130
页数:4
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