CHEMICAL VAPOR DEPOSITION OF MO ONTO SI

被引：23

作者：

CASEY, JJ

VERDERBE.RR

GARNACHE, RR

机构：

来源：

关键词：

D O I：

10.1149/1.2426538

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：201 / &

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[6]

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[7]

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[8]

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[9]

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