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DEPOSITION OF OPTICAL COATINGS - PROCESS-CONTROL AND AUTOMATION

被引：14
作者：
THOENI, WP
机构：
来源：
THIN SOLID FILMS | 1982年 / 88卷 / 04期
关键词：
D O I：
10.1016/0040-6090(82)90178-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：385 / 397
页数：13
相关论文
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