HYDROGEN ADSORPTION ON SI(100) SURFACE STUDIED BY MEV ION-SCATTERING

被引：12

作者：

NARUSAWA, T

GIBSON, WM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期

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D O I：

10.1116/1.570404

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：256 / 256

页数：1

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