OPTOELECTRONIC DETECTOR PROBES FOR SCANNING NEAR-FIELD OPTICAL MICROSCOPY

被引:3
作者
DANZEBRINK, HU
机构
[1] Physikalisch-Technische Bundesanstalt, Braunschweig, D-38116
来源
JOURNAL OF MICROSCOPY-OXFORD | 1994年 / 176卷
关键词
SCANNING NEAR-FIELD OPTICAL MICROSCOPY; OPTOELECTRONIC PROBE; METAL-SEMICONDUCTOR-METAL PHOTODETECTOR; SUBMICROSCOPIC APERTURE; MICROSENSOR; SCHOTTKY CONTACT; SEMICONDUCTOR PROBE; SCANNING FORCE MICROSCOPY;
D O I
10.1111/j.1365-2818.1994.tb03525.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
A brief explanation of the optoelectronic probe concept and a comparison between the implementation of passive waveguide probes and optoelectronic probes in scanning near-field optical microscopy (SNOM) is presented. The first probe realizations using cleaved semiconductor crystals and the work at present in progress using microfabricated Si pyramids are described. These crystals with evaporated metal electrodes forming a slit aperture with subwavelength dimensions work as metal-semiconductor-metal photodetectors. Their optical detection behaviour is investigated by measuring the intensity distribution of a laser focal point. Measurements where the external bias voltage is changed show that it is possible to modify the detection behaviour of the device because of the varying depletion widths. The last part of the article describes a concept where pyramidal probes should function simultaneously as sensors for scanning force microscopy (SFM) to measure topography and as optoelectronic probes for scanning near-field optoelectronic microscopy (SNOEM).
引用
收藏
页码:276 / 280
页数:5
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