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APPLICATION OF THE PHOTOACOUSTIC TECHNIQUE TO THE DETERMINATION OF THE THICKNESS OF MULTILAYER FILMS PRODUCED BY MAGNETRON SPUTTERING

被引：4
作者：
RAMOS, MMD
FERREIRA, JA
ISABEL, M
FERREIRA, C
DOSSANTOS, MP
机构：
来源：
VACUUM | 1989年 / 39卷 / 7-8期
关键词：
D O I：
10.1016/0042-207X(89)90026-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：731 / 733
页数：3
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