OPTICAL-EMISSION SPECTROSCOPY OF THE SIH-4-NH-3-H-2 PLASMA DURING THE GROWTH OF SILICON-NITRIDE

被引：23

作者：

YOKOYAMA, S

HIROSE, M

OSAKA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 02期

关键词：

D O I：

10.1143/JJAP.20.L117

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L117 / L120

页数：4

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[10] NOVEL EFFECTS OF MAGNETIC-FIELD ON THE SILANE GLOW-DISCHARGE [J].

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