EFFECT OF A MAGNETIC-FIELD ON THE DEPOSITION OF TIO2 FILMS

被引：2

作者：

ALBERTINETTI, N ^{[1
]}

MINDEN, HT ^{[1
]}

机构：

[1] NORTHROP CORP,NORWOOD,MA 02062

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 02期

关键词：

D O I：

10.1116/1.578742

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In the process of making magnetic mirrors for ring laser gyroscopes a hard multilayer dielectric stack was deposited in the presence of a magnetic field. The thickness of the TiO2 layers was nonuniform while the thickness of the SiO2 layers was unaffected by the magnetic field. The thickness distribution was determined and the thickness variation of a single layer was measured. Speculations are presented as to the origin of the effect.

引用

页码：398 / 399

页数：2