CHEMICAL-VAPOR-DEPOSITION OF PYROLYTIC CARBON ON POLISHED SUBSTRATES

Pyrolytic carbon thin (4-100 nm) films were obtained from methane in a hot wall reactor on optically polished inert substrates by varying the deposition time and temperature. They were characterized by all modes of TEM. They are composed in majority of lamellar pyrocarbon whose thickness and disorder increases with increasing temperature. Isotropic carbon islands are also observed at the upper surface of the film.