GAS DISCHARGE CLEANING OF VACUUM SURFACES

被引：39

作者：

GOVIER, RP

MCCRACKE.GM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.1315874

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：552 / &

共 12 条

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[7]

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