PROPERTIES OF ARC-EVAPORATED CRN AND (CR, AL)N COATINGS

被引：106

作者：

KNOTEK, O ^{[1
]}

LOFFLER, F ^{[1
]}

SCHOLL, HJ ^{[1
]}

机构：

[1] RHEIN WESTFAL TH AACHEN,LEHRSTUHL WERKSTOFFKUNDE B,W-5100 AACHEN,GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 45卷 / 1-3期

关键词：

Aluminum Compounds - Chromium Compounds - Cutting Tools - Electric Arcs - Nitrides;

D O I：

10.1016/0257-8972(91)90205-B

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Refinement of the physical vapour deposition (PVD) process has created the necessary conditions for controlled production of thin film systems with defined properties. Complex films such as CrN and (Cr, Al)N have particularly high potential as wear- and corrosion-resistant functional coatings for metal tools. These films are deposited using the highly sophisticated PVD process of ion plating with an arc source and, for comparison, magnetron sputtering. Methods of attaining defined film properties by altering the process parameters are indicated. Production of the films is directly linked with analysis or the development of suitable analytic techniques. Film properties such as thickness, microhardness and adhesion are optimized for maximum wear and corrosion resistance. X-ray microstructure analyses are used to determine the phases and their crystalline structures and orientations. Finally, scanning electron microscopy is employed to document the structure and formation of the films. Indications of the corrosion resistance of PVD films can be obtained from laboratory tests, particularly dislocating tests and measurements of current density-potential curves.

引用

页码：53 / 58

页数：6