FOURIER-TRANSFORM IR REFLECTION TECHNIQUES FOR CHARACTERIZATION OF POLYIMIDE FILMS ON COPPER SUBSTRATES

被引：35

作者：

KELLEY, K

ISHINO, Y

ISHIDA, H

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(87)90371-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：271 / 279

页数：9

共 25 条

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